Enabling Technology for MEMS and Nanodevices
by Henry BaltesNow available in softcover, this book closely examines the enabling technologies for the fabrication of micro- and nanodevices.
Divided into two clearly structured sections, the first begins with an insider's view of industrial MEMS commercializatio.
- Format
- 439 pages
- First published
- 2013
- Publishers
- Wiley & Sons· Incorporated· John
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